Abstarct: In this thesis, copper aluminum oxide (CuAlO2) thin films were prepared by spin and dip sol–gel techniques. The average thickness of the samples was 150 nm. In order to obtain optimized conditions for synthesis of the samples, the effect of some parameters such as type of substrate, drying and annealing temperature and the molar ratio of aluminum to copper on the optical properties of the samples were investigated. The results showed that annealing process at the range of 750-1100 oC is essential for the crystallization of the CuAlO2 structures. Moreover, the annealing atmosphere (vacuum or inert gas) can affect the structural and optical properties of the samples. Comparison of the results showed that the structural and optical properties of the samples which annealed in argon atmosphere are better than the other samples. This study also showed that the selection of drying good temperature is an important parameter in orther to prepare samples with structural and optical properties. our results showed that the appropriate drying temperature for CuAlO2 thin films which are grown on quartz substrates by spin sol–gel method is 400 oC . The effect of film thickness on structural and optical properties of copper-aluminum oxide thin films were also investigated .This study showed that the sample with laxyer thicknesses of 140nm had better structural and optical properties. The effect molar ratio Al/Cu (=0.8,1,1.2) on structural and optical properties of the sample were also studied. This study showed that the sample grown with Al/Cu=0.8 had better quality than the others.