Abstarct: The MEMS technology applications in the manufacture of electronic devices in different fields. Examples of this can be making various sensors in the automobile industry, making Bio MEMS sensors, underwater sensors, etc. One area where this technology has been entered in to is the field of Radio-frequency (RF) that known by name of RF MEMS. In this scope, various devices are made such as antennas, resonator, oscillator, filter, etc. Resonators are the most important part of the MEMS filters, although the operation of the filter are doing and they can be named as filters with less bandwidth. In this thesis, one resonator is designed and simulated which have a UHF frequency range and have higher quality factor than resonators that has been in traduced, too. This structure as well as other MEMS resonators is a capacitive structure which is composed of two parts: movable and stationary that with these two get together, forming a capacitor. The stationary part is the entry signal that stimulate the structure. When the frequency of the input signal in natural frequency of movable part, this part has begun to swing, change the air gap, thereupon a variable capacitor that produces a current with same frequency of input signal in output. In other word, when will the output signal that have capacitance changes and changes in capacitance caused by oscillation of the movable part, that this in natural frequency range of movable part. So we can say this structure in a certain frequency range allow the input signal to passes, in fact it is filtered. But oscillation frequency, displacement, amplitude and quality factor of structure dependent to material, size and geometry of the structure, so we can with change this parameters achieved to suitable oscillation frequency and quality factor. To this structures if can maintain their high quality factor, we can build very small filters with high efficiency and low cost by these kind of resonators. In proposed resonator used the materials that have a higher sound velocity among the deposition material. On the other hand, we have reduced the radius of structure that these two result, high resonant frequency up to 1.9GHz and also by using two different material for the main body and anchor causes an impedance mismatch and prevent transmission of the maximum energy out of the system, that this work causes reduce anchor losses and higher quality factor .