Abstarct: Surface barrier discharge plasma (SDBD) is a non-equilibrium plasma system in which an alternating electric field is applied between two electrodes. This plasma has unique microscopic properties that make it suitable for various applications, such as disinfection, surface modification, and food processing. Measuring microscopic parameters such as electron density and temperature and optimizing the determining parameters experimentally and in the laboratory is very difficult and costly (virtually uneconomical). In these conditions, simulation will be a solution. In this study, using the COMSOL Multiphysics numerical simulation software, the distribution of the applied field and potential was obtained in different electrode structures, including T-tree, honeycomb, comb, and mesh. The effect of changing voltage, electrode geometry, dielectric thickness, dielectric material, and voltage shape on the microscopic properties of SDBD plasma was also investigated. The results show that these parameters can have a significant impact on properties such as plasma density and species distribution. The results showed that the electric field is maximized around the electrode. In general, increasing voltage, sharp electrode geometry, low dielectric thickness, and high relative permittivity dielectric material increase plasma density. Additionally, the voltage shape has a direct impact on the maximum species density. These results can be used to design and optimize SDBD systems for various applications.