Abstarct: In this thesis, first cadmium stannate ( ) thin films were grown by spray pyrolysis method. Then the effect of deposition temperature, solution flow rate, nozzle to substrate distance, volume of the spray solution, kind of the solvent, annealing temperature and its time on the structural, optical and electrical properties of the films have been investigated. Fluorine-doped cadmium stannate ( ) thin films were also grown with the same method and the effect of the doping on the structural, optical and electrical properties of the samples investigated. X-ray diffraction spectra and SEM images were used for structural characterization of the films. Optical and electrical properties of the samples were investigated by the transmittance spectra and four probe measurements. The results show that some parameters such as deposition temperature, volume of the spray solution, doping concentration, annealing temperature and its duration have considerable effects on the structural, optical and electrical properties of the films.