Abstarct: The wear phenomenon is one of the most important factors in the failure of industrial parts. Hard coatings on industrial tools and equipment improve performance and increase their lifespan. Versatile and reliable techniques for evaluation of hard thin coatings are necessary. To perform such tests, a device that is fast, accurate and cost-effective and has good performance is required. In order to achieve this goal, in this thesis, a micro slurry-jet erosion test (MSE) device, was designed and fabricated. This device makes use of ultra-hard alumina particles. In the MSE test device, the slurry inside the tank is forced by high pressure air to pass through a narrow nozzle at high jet velocity and hits the sample surface. The slurry eventually enters a receiver tray for re-consumption. In this research, after the construction of the MSE device, tests were carried on the performance and repeatability of the device with water at different air pressures. Thereafter, the testes were performed with slurry using different air pressures and slurry concentrations to ensure its performance. Very good repeatability of the device was observed. The slurry contains alumina particles with a mean diameter of about 1 μm. The particle size was measured using scanning electron microscopy. Then, three tungsten carbide substrates, coated with thin multilxayers of TiN, TiCN, Al2O3 and TiAlN were prepared using chemical vapor deposition technique. The thickness of the coated laxyers were in range of 2-7 μm. The coated samples were subject to micro-slurry jet erosion test under specific pressure and concentration. The wear rate of the specimens was measured using stylus profilometer. From the results it could be observed that the MSE test device can be used for comparing of the he abrasion resistance of the thin hard coatings.