QC521 : Investigation of optical and structural properties carbon amorphous films with doped non Carbide by magnetron sputtering
Thesis > Central Library of Shahrood University > Physics > MSc > 2020
Authors:
Alireza Mikhchin [Author], Seyed Iman Hosseini[Supervisor]
Abstarct: In this research, the structural, optical ,and electricals properties of diamond-like carbon thin films that are continuously laxyered by direct current and radiofrequency magnetron sputtering have been investigated. In this research, the effect of two parameters of change of power and voltage of substrate bias for the properties of diamond-like carbon thin films if exposed and the results show that these two parameters have a significant effect on the properties of diamond –like carbon films. The results of the fabrication analysis, which is shown by Raman analysis, do not change with increasing direct current strength in SP2 material, but the application of bias voltage under its force is below the direct amplification power of SP3 light. Increasing the radio frequency power has increased the structure of SP2 while the bias voltage shows a steady trend for such that it can not exist. Good optical films compared to SP3 / SP2 in structural films are examined at each stage. The failure of the films, which is badly obtained by elliptical measurement, is greater than the SP3 / SP2 ratio to the amount of hydrogen and hydrocarbon bonds in the structure of the associated films. The resistance of laminated films is due to the use of a unique current-voltage (I-V) current that increases the copper nanoparticles in the films and also continues the oxidation of these nanoparticles on the suRFace of the films for its application rate. Optical emission spectroscopy (OES) analysis is used for use in the plasma generated for laxyering as well as other types active in the laxyering process to make the required films.
Keywords:
#Diamond-like carbon #DC and simultaneous radio frequency power supply #Non-carbide impurities #Bias voltage Keeping place: Central Library of Shahrood University
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