Abstarct: In this research, Zn-doped (WO3 : Zn) and antimony-doped (WO3 : Sb) tungsten oxide thin films were deposited on glass substrates using the spray pyrolysis technique. The effect of Zn and Sb doping was studied on the structural, optical and voltammetry properties of these films. For the preparation of Zn doped WO3 thin films different atomic percentages of Zn (0, 2, 5, 10 and 20 at.%) was added to the precursor solution. In the case of Sb doped WO3, thin films different atomic ratios of Sb were changed(0,1,2,5,10 and 20at %).The XRD analysis result indicated the formation of monoclinic phase of WO3 in undoped WO3 films. The peaks intensity of WO3 phase decreased with increasing the amounts of Zn doping level up to 5 at %. Further increasing of Zn doping up to 10 and 20 at.% caused the appearing of ZnWO4 phase. The band gap values were calculated to be in the range of 3.4 - 4 eV. Investigation of electrochromic properties showed that WO3 10 at % Zn has the most variation in color. Sb2O3 phase was observed in Sb doped WO3 (2 at.%) film. Also, Sb0.15WO3 phase appeared in the films with Sb doping level more than 5 at %. FESEM images of films showed that grains have been grown in microsphere shape. Also,in this thesis some investigations were started on the growth of WS2 thin films using sulfurization of WO3 furnounce at 600°c.