Abstarct: In this study Thin films of pure ZnTe and Cu doped ZnTe were prepared by thermal evaporation method and then the structural and optical properties of these samples were investigated. Structure and Morphology of the samples were evaluated using X-ray diffraction device (XRD) and scanning electron microscopy (FESEM), respectively. Optical properties of the samples were also studied by measuring transmission and reflection spectra using a UV-VIS device. Investigation of the structural properties of pure and Cu doped ZnTe thin films annealed at 150 0 C for one hour in vacuum showed that the crystalline structure of the samples is cubic and the crystallinty of thin films decrease by annealing. The average crystallite size increases after annealing.The transmittance and the bandgaps of the samples increase significantly after annealing. Extinction coefficient decreases and refractive index increase after annealing. The same behavior was also observed for real and imaginary parts of dielectric constants. In the study of the effect of substrate temperature (27° C, 100° C and 150° C) on structural and optical properties, increase of substrate temperature improves the crystallinity of the samples and the band gaps of the samples decrease. Extinction coefficient and refractive index increase with increase in substrate temperature. The results show that increase in distance between source and substrate causes decrease in thicknes، increase in Transmittanceand crystallinty and bandgaps. Increase in thin films thicknes causes amorphous structure and reduction of the bandgap and Transmittance. The study of the effect of copper doping (2%, 4% and 8%) on the structural and optical properties of the laxyers showed that by adding copper impurit, the size of crystallite increase and the latticconstant , Transmittance spectrum and bandgap decrease. Reflection from the surface of the laxyers increases with increasing copper impurity. The refractive and extinction coefficients and the real and imaginary parts of the dielectric constant of the laxyers also increase with increasing copper impurity.