QC339 : Investigation of optical and structural properties of diamond- like carbon films deposited by DC magnetron sputtering
Thesis > Central Library of Shahrood University > Physics > MSc > 2016
Authors:
Saeid Khodadadi Najaf Abadi [Author], Mahdi Momeni[Supervisor], Seyed Iman Hosseini[Supervisor]
Abstarct: In this work, optical, structural and morphological properties of diamond-like carbon thin films deposited by DC magnetron sputtering was investigated. In this research, the effect of sputtering power and Argon gas flow rate on the properties of diamond-like carbon films as two parameter was studied and results showed that these parameters have an extensive and undeniable effect on the structural, optical and morphological properties of amorphous carbon films. The structure of the films was studied by raman spectroscopy to find graphite like (sp2) and diamond like (sp3) bonds. Results showed that with increasing sputtering power, sp3 bonds was increased in 8 sccm Argon gas flow rate. Also it was observed that by increasing sputtering gas flow rate, sp2 bonds increased in 100 watt. Optical properties of the films such as refractive index and extinction coefficient was investigated by spectroscopic ellipsometery (SE) and then indirect optical band gap was calcultaed. Results showed that with increasing sp2 bonds the band gap decrease. Topography and rougness of the films surface studied by atomic force microscopy (AFM) and it was shown by increasing sp2 graphite clusters, the roughness of the films surface increased. Optical emission spectroscopy (OES) was used to find dominant elements and reactive species in the plasma and the relation between those bonds and structure of the films was studied.
Keywords:
#Diamond-like carbon films #DC magnetron sputtering #band gap #refractive index Link
Keeping place: Central Library of Shahrood University
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